1. De-vacuum the Chamber :
Slowly vent the chamber using the controlled venting system to avoid contamination or sudden pressure fluctuations.
Purge Ar or N₂ gas to vent and wait until the chamber reaches atmospheric pressure before opening the door.

2. Load the Sample :
Wear clean gloves or use tweezers to handle the sample to prevent contamination and place the sample on the stage, ensuring it is securely mounted.
If necessary, apply conductive coating to non-conductive samples to prevent charging effects.

3. Vacuum the Chamber :
Close the chamber and start the vacuum pump system to remove air from the chamber, allow the vacuum system to reach the required pressure 10^-4 Pa, which may take a few minutes, Confirm the pressure reading on the display panel before proceeding.

5. Turn On the Electron Beam :
Turn on the beam, gradually increase the beam voltage and current to avoid sudden changes.

6. Magnify the Desired Location :
Use the stage controls to move to the region of interest, adjust focus, brightness, and contrast to optimize image clarity. Set appropriate working distance and magnification for imaging or analysis.

7. Capture an Image or Start Compositional Mapping :
For imaging : Adjust settings like dwell time, resolution, and scan speed before capturing the image.
For compositional mapping : Define the mapping area and acquisition parameters. Start data acquisition and monitor the live signal.

8. Turn Off the Electron Beam :
Gradually decrease the beam voltage before turning it off.